Apparatus for forming crystalline sheet from a melt
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsDawei Sun, Peter L. Kellerman, Gregory Thronson
Life of this patent
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Abstract
An apparatus for drawing a crystalline sheet from a melt. The apparatus may include a crucible configured to contain the melt and having a dam structure, where the melt comprises an exposed surface having a level defined by a top of the dam structure. The apparatus may further include a support apparatus disposed within the crucible and having an upper surface, wherein the crystalline sheet is maintained flush with the exposed surface of the melt when drawn over the support apparatus, and may include a melt-back heater directing heat through the upper surface of the support apparatus to partially melt the crystalline sheet when the crystalline sheet is drawn over the support apparatus.
Claims16
An apparatus for drawing a crystalline sheet from a melt, comprising:
- a crucible configured to contain the melt and having a dam structure, the melt comprising an exposed surface having a level defined by a top of the dam structure;
- a support apparatus disposed within the crucible and having an upper surface, wherein the crystalline sheet is maintained flush with the exposed surface of the melt when drawn over the support apparatus, wherein the upper surface of the support apparatus is disposed below the crystalline sheet and parallel to the exposed surface of the melt, wherein the support apparatus comprises:
- a fixed portion extending from a bottom of the crucible;
- and
- an adjustable portion, the adjustable portion defining the upper surface of the support apparatus, wherein the adjustable portion is movable from a first position where the upper surface is disposed at a first level with respect to the top of the dam structure, to a second position where the upper surface is disposed at a second level with respect to the top of the dam structure.
An apparatus for growing a crystalline sheet from a melt, comprising:
- a crucible configured to contain the melt and having a dam structure, the melt having an exposed surface defined by a top of the dam structure;
- a crystallizer disposed above the melt to remove heat in a cooling zone from the exposed surface of the melt, wherein a leading edge of the crystalline sheet forms at the exposed surface in the cooling zone, the crystalline sheet having an initial sheet thickness;
- and
- a support apparatus disposed within the crucible beginning and ending downstream of the crystallizer and having an upper surface, wherein the crystalline sheet is maintained flush with the exposed surface of the melt when drawn over the support apparatus, wherein the upper surface of the support apparatus is parallel to the exposed surface of the melt.
An apparatus for drawing a crystalline sheet from a melt, comprising:
- a crucible configured to contain the melt and having a dam structure, the melt comprising an exposed surface having a level defined by a top of the dam structure;
- a support apparatus disposed within the crucible and having an upper surface, wherein the crystalline sheet is maintained flush with the exposed surface of the melt when drawn over the support apparatus;
- and
- a melt-back heater directing heat through the upper surface of the support apparatus to partially melt the crystalline sheet when the crystalline sheet is drawn over the support apparatus, wherein the support apparatus comprises:
- a fixed portion extending from a bottom of the crucible;
- and
- an adjustable portion, the adjustable portion defining the upper surface of the support apparatus, wherein the adjustable portion is movable from a first position where the upper surface is disposed at a first level with respect to the top of the dam structure, to a second position where the upper surface is disposed at a second level with respect to the top of the dam structure.
Dependencies are inferred from the claim text.