Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium

A liquid immersion exposure apparatus comprising:

• a projection system having a last optical member via which exposure light is projected;
• and
• a liquid immersion member which forms a liquid immersion space under an emitting surface of the last optical member,
• wherein:
• the liquid immersion member includes (i) a first member which is disposed in at least a portion of a periphery of the last optical member, the first member having a first surface, and (ii) a second member which is movable relative to the first member and which includes a liquid recovery port that recovers at least a portion of a liquid in the liquid immersion space,
• the second member is moved in a direction perpendicular to an optical axis of the last optical member so that a relative speed between the second member and an object below the liquid immersion member is smaller than a relative speed between the first member and the object, while recovering the liquid in a gap between the second member and the object via the liquid recovery port of the second member,
• the second member has an outer surface that faces radially outward relative to the optical axis of the last optical member, and
• the first member is not present in an area that extends radially outward from the outer surface of the second member.