Resist composition

A resist composition comprising

• a resin (A1) which has a structural unit represented by formula (I), a structural unit represented by formula (II), and a structural unit having an acid-labile group,
• a resin (A2) which has a structural unit having a fluorine atom and no structural unit having an acid-labile group,
• an acid generator, and
• a weak acid inner salt represented by formula (D),
• wherein the proportion of the resin (A2) is 1 parts by mass to 30 parts by mass with respect to 100 parts by mass of the resin (A1),
• wherein formula (I) is as follows:
• wherein R1 represents a hydrogen atom, a halogen atom or a C1 to C6 alkyl group that may have a halogen atom, Ra25 in each occurrence represents a carboxy group, a cyano group or a C1 to C4 aliphatic hydrocarbon group, A1 represents a single bond, *-A2-O—, *-A2-CO—O—, *-A2-CO—O— A3-CO—O—, or *-A2-O—CO-A3-O— where * represents a binding position to an oxygen atom, A2 and A3 independently represent a C1 to C6 alkanediyl group, and w1 represents an integer of 0 to 8,
• wherein formula (II) is as follows:
• wherein R2 represents a hydrogen atom, a halogen atom or a C1 to C6 alkyl group that may have a halogen atom, L1 represents a single bond or *-L2-CO—O-(L3-CO—O)g— where * represents a binding position to an oxygen atom, L2 and L3 independently represent a C1 to C12 divalent hydrocarbon group, g represents 0 or 1, and R3 represents a C2 to C8 linear alkyl group, and
• wherein formula (D) is as follows:
• wherein RD1 and RD2 in each occurrence independently represent a C1 to C12 hydrocarbon group, a C1 to C6 alkoxy group, a C2 to C7 acyl group, a C2 to C7 acyloxy group, a C2 to C7 alkoxy-carbonyl group, a nitro group or a halogen atom, and m′ and n′ independently represent an integer of 0 to 4.