Integration of silicon thin-film transistors and metal-oxide thin film transistors
AssigneeThe Hong Kong University of Science and Technology
InventorsLei Lu, Wei Zhou, Man Wong, Hoi Sing Kwok
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AssigneeThe Hong Kong University of Science and Technology
InventorsLei Lu, Wei Zhou, Man Wong, Hoi Sing Kwok
Estimating the term…
This disclosure relates generally to the three-dimensional (3D) integrated thin-film transistors (TFTs) with silicon and metal-oxide (MO) semiconductors as the active layers. In one or more embodiments, an apparatus is provided that comprises a first transistor comprising a silicon active layer, and a second transistor comprising a metal oxide active layer. The second transistor is vertically stacked on the first transistor, and the first transistor and the second transistor share a gate electrode formed between the silicon active layer and the metal oxide active layer. With these embodiments, the gate electrode corresponds to a top gate of the first transistor and a bottom gate of the second transistor.
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Dependencies are inferred from the claim text.