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US 10,504,870 B2Granted
Mechanisms for forming bonding structures
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYeong-Jyh Lin, Hsin-Hung Liao, Chien Ling Hwang, Bor-Ping Jang, Hsiao-Chung Liang, Chung-Shi Liu
Life of this patent
Estimating the term…
Abstract
Embodiments of mechanisms for forming a package are provided. The package includes a substrate and a contact pad formed on the substrate. The package also includes a conductive pillar bonded to the contact pad through solder formed between the conductive pillar and the contact pad. The solder is in direct contact with the conductive pillar.
Claims19
A method for forming a package structure, the method comprising:
- providing a first substrate having a plurality of contact pads formed thereon;
- applying a first solder on the plurality of contact pads;
- providing a support substrate having a plurality of cavities;
- disposing a plurality of first conductive pillars in respective ones of the plurality of cavities;
- disposing a plurality of second conductive pillars in respective ones of the plurality of cavities, wherein a shape of the plurality of first conductive pillars is different than a shape of the plurality of second conductive pillars;
- attaching the plurality of first conductive pillars and the plurality of second conductive pillars to the plurality of contact pads by the first solder using a first reflow process, the first solder extending between the plurality of contact pads and corresponding ones of the plurality of first conductive pillars and the plurality of second conductive pillars;
- after attaching the plurality of first conductive pillars and the plurality of second conductive pillars, forming a protective layer along sidewalls of the plurality of first conductive pillars and the plurality of second conductive pillars;
- and
- after attaching the plurality of first conductive pillars, bonding a second substrate to the plurality of first conductive pillars and the plurality of second conductive pillars with a second solder, wherein the second solder extends along sidewalls of the plurality of first conductive pillars and the plurality of second conductive pillars, wherein the second solder directly contacts the protective layer adjacent a first pillar of the plurality of first conductive pillars, wherein after bonding the second substrate the first solder completely separates the plurality of first conductive pillars from the plurality of contact pads and the second solder completely separates the plurality of first conductive pillars from contact pads of the second substrate.
6 more elements
A method for forming a package structure, the method comprising:
- applying a first conductive material to a first contact pad and applying a second conductive material to a second contact pad of a first substrate;
- after applying the first conductive material to the first contact pad and the second conductive material to the second contact pad, attaching a first conductive pillar to the first conductive material on the first contact pad and attaching a second conductive pillar to the second conductive material on the second contact pad;
- after attaching the first conductive pillar and the second conductive pillar, forming a protective layer over the first substrate, the protective layer completely covering the first conductive material and the second conductive material;
- and
- attaching a second substrate to the first conductive pillar and the second conductive pillar, the second substrate having a third contact pad and a third conductive material on the third contact pad and having a fourth contact pad and a fourth conductive material on the fourth contact pad, wherein after attaching the second substrate the first conductive material completely separates the first conductive pillar from the first contact pad, the second conductive material completely separates the second conductive pillar from the second contact pad, the third conductive material completely separates the first conductive pillar from the third contact pad, and the fourth conductive material completely separates the second conductive pillar from the fourth contact pad, wherein after attaching the second substrate, at least a portion of sidewalls of the second conductive material are free of the protective layer, the third conductive material extends along sidewalls of the first conductive pillar, and the fourth conductive material extends along sidewalls of the second conductive pillar, the third conductive material directly contacts the protective layer, and the fourth conductive material does not directly contact the protective layer.
2 more elements
A method for forming a package structure, comprising:
- applying a first conductive material to a first contact pad of a first substrate;
- after applying the first conductive material to the first contact pad, reflowing the first conductive material and attaching a first end of a first conductive pillar to the first conductive material;
- after reflowing the first conductive material, forming a protective layer on the first substrate, the first conductive pillar protruding through the protective layer;
- and
- after forming the protective layer, reflowing a second conductive material attaching a second end of the first conductive pillar to a second contact pad of a second substrate, thereby bonding the first substrate to the second substrate, wherein after reflowing the second conductive material the first conductive pillar is spaced apart from the first contact pad and the second contact pad, wherein the second conductive material contacts sidewalls of the first conductive pillar, wherein the first conductive material has a higher reflow temperature than the second conductive material, wherein the second conductive material directly contacts the protective layer;
- and
- attaching the first substrate to the second substrate using a second conductive pillar, wherein attaching the first substrate to the second substrate using the second conductive pillar comprises:
- attaching the second conductive pillar to a third contact pad on the first substrate with a third conductive material;
- and
- attaching the second conductive pillar to a fourth contact pad on the second substrate with a fourth conductive material, wherein the fourth conductive material extends along sidewalls of the second conductive pillar, the fourth conductive material being spaced apart from the protective layer.
7 more elements
Dependencies are inferred from the claim text.