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US 10,504,867 B2Granted
Semiconductor device having a bonding pad
AssigneeAblic Inc.
InventorKoichi Shimazaki
Life of this patent
Estimating the term…
Abstract
A semiconductor device has a bonding pad and a wiring layer formed on an insulating film. The wiring layer is spaced from the bonding pad by a gap. A passivation film covers the bonding pad and the wiring layer and fills the gap. The gap has a width equal to or larger than the thickness of the passivation film, and equal to or smaller than twice a side wall thickness of the passivation film covering a side wall of the wiring layer. The semiconductor device has a high resistance to stress during bonding.
Claims14
A semiconductor device, comprising:
- a semiconductor substrate;
- an insulating film formed on a surface of the semiconductor substrate;
- a bonding pad formed on the insulating film;
- a top wiring layer, which is not a bonding pad, formed on the insulating film around the bonding pad and spaced in a horizontal direction from the bonding pad by a gap, the top wiring layer having an inner side wall horizontally spaced from and facing the bonding pad and defining therebetween the gap, and an outer side wall opposite the inner side wall;
- and
- a passivation film formed on and covering the bonding pad and the top wiring layer and having an opening portion that exposes the bonding pad, the passivation film having in a region covering a top surface of the top wiring layer a vertical thickness and having in a region covering a major portion of the outer side wall of the top wiring layer a horizontal thickness, the aforesaid vertical thickness and horizontal thickness being smaller than a vertical thickness of the bonding pad, and the passivation film having a slit that exposes part of the top surface of the top wiring layer formed around the bonding pad, and the passivation film having a slit that exposes part of the top surface of the top wiring layer formed around the bonding pad,
- wherein a width of the slit is smaller than a width of the opening portion, and
- wherein the gap has a width equal to or larger than the vertical and horizontal thicknesses of the passivation film in the regions covering the top surface and the major portion of the outer side wall of the top wiring layer, and equal to or smaller than twice the horizontal thickness of the passivation film covering the major portion of the outer side wall of the top wiring layer.
5 more elements
A semiconductor device, comprising:
- a semiconductor substrate;
- an insulating film, devoid of through openings, formed on a surface of the semiconductor substrate;
- a bonding pad having uniform thickness formed on the insulating film;
- a top wiring layer, which is not a bonding pad, formed on the insulating film around the bonding pad and spaced from the bonding pad by a gap;
- and
- a passivation film formed on and covering the bonding pad and the top wiring layer, the passivation film having an opening portion that exposes the bonding pad and having in a region covering a top surface and in a region deposited on a side wall opposite the bonding pad of the top wiring layer a thickness smaller than a thickness of the bonding pad, and the passivation film having a slit that exposes part of the top surface of the top wiring layer formed around the bonding pad,
- wherein a width of the slit is smaller than a width of the opening portion, and
- wherein the gap has a width equal to or larger than the thickness of the passivation film in the region covering the top surface and in the region deposited on the side wall opposite the bonding pad of the top wiring layer, and equal to or smaller than twice the thickness of the passivation film deposited on the side wall opposite the bonding pad of the top wiring layer.
5 more elements
Dependencies are inferred from the claim text.