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US 10,504,865 B2Granted
Package structure and method of manufacturing the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMing-Kai Liu, Han-Ping Pu, Ting-Chu Ko, Yung-Ping Chiang, Chang-Wen Huang, Yu-Sheng Hsieh
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Abstract
Provided is a package structure includes a die having a first connector, a RDL structure disposed on the die, and a second connector. The RDL structure includes at least one elongated via located on and connected to the first connector. The second connector is disposed on and connected to the RDL structure.
Claims20
A package structure, comprising:
- a die having a first connector;
- an encapsulant, laterally encapsulating sidewalls of the die;
- a RDL structure disposed on the die and the encapsulant, the RDL structure comprises:
- a dielectric layer on top surfaces of the die and the encapsulant;
- and
- a redistribution layer, penetrating through the dielectric layer to connect to the die;
- comprising:
- at least one elongated via located on and connected to the first connector, wherein the at least one elongated via is embedded in the dielectric layer, and comprises a first seed layer and a first conductive layer on the first seed layer;
- and
- at least one trace, extending on and in contact with top surfaces of the at least one elongated via and the dielectric layer, the at least one trace comprises a second seed layer and a second conductive layer on the second seed layer, wherein the second seed layer is separated from the first seed layer by the first conductive layer therebetween;
- and
- a second connector disposed on and connected to the RDL structure,
- wherein the elongated via comprises an elongated bottom surface contacting with and extending along a top surface of the first connector, the elongated bottom surface comprises a length extending along a first direction and a width extending along a second direction perpendicular to the first direction,
- wherein the length of the elongated bottom surface is larger than the width of the elongated bottom surface.
11 more elements
A package structure, comprising:
- a die having a first connector;
- an encapsulant, laterally encapsulating sidewalls of the die;
- a RDL structure disposed over the die and the encapsulant, wherein the RDL structure comprises:
- a dielectric layer on top surfaces of the die and the encapsulant;
- and
- a via embedded in the dielectric layer and located on the first connector, wherein an area of a bottom surface of the via is larger than an area of a top surface of the via, and the bottom surface is in contact with and electrically connected to the first connector, wherein the via comprises a first seed layer and a first conductive layer on the first seed layer, and a portion of a top surface of the first seed layer is in contact with the dielectric layer;
- and
- a second connector disposed on and connected to the RDL structure.
5 more elements
A method of manufacturing a package structure, comprising:
- forming an encapsulant aside a die having a first connector, so as to laterally encapsulating sidewalls of the die;
- forming a RDL structure on the die and the encapsulant, wherein RDL structure comprises a dielectric layer on top surfaces of the die and the encapsulant;
- and a redistribution layer penetrating through the dielectric layer to connect to the die, the forming the RDL structure comprising:
- forming at least one elongated via located on and connected to the first connector, wherein the at least one elongated via comprises a first seed layer and a first conductive layer on the first seed layer;
- forming the dielectric layer, such that the at least one elongated via is embedded in the dielectric layer;
- and
- forming at least one trace extending on and in contact with top surfaces of the at least one elongated via and the dielectric layer, the at least one trace comprises a second seed layer and a second conductive layer on the second seed layer, wherein the second seed layer is separated from the first seed layer by the first conductive layer therebetween;
- and
- forming a second connector over and connected to the RDL structure,
- wherein the elongated via comprises an elongated bottom surface contacting and extending along a top surface of the first connector, the elongated bottom surface comprises a length extending along a first direction and a width extending along a second direction perpendicular to the first direction,
- wherein the length of the elongated bottom surface is larger than the width of the elongated bottom surface.
8 more elements
Dependencies are inferred from the claim text.