Semiconductor device
AssigneeFuji Electric Co., Ltd.
InventorsShoji Yamada, Takashi Shiigi, Yasuyuki Hoshi
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AssigneeFuji Electric Co., Ltd.
InventorsShoji Yamada, Takashi Shiigi, Yasuyuki Hoshi
Estimating the term…
A main semiconductor element and a temperature sensing part are arranged on a single silicon carbide base. The main semiconductor element is a vertical MOSFET and the temperature sensing part is a horizontal diode. An anode region of the temperature sensing part and an n+-type source region and a p+-type contact region of the main semiconductor element are connected by wiring by an anode electrode on a front surface of the silicon carbide base. The temperature sensing part, when the main semiconductor element is ON, is forward biased by drift current flowing in the main semiconductor element. The temperature sensing part, for example, is a poly-silicon diode constituted by a p-type poly-silicon layer and an n-type poly-silicon layer arranged on the front surface of the silicon carbide base. With such configuration, a semiconductor device having high reliability may be provided.
A semiconductor device comprising:
Dependencies are inferred from the claim text.