Laser processing apparatus
AssigneeDisco Corporation
InventorsKeiji Nomaru, Yuji Hadano
Life of this patent
Estimating the term…
Loading patent…
AssigneeDisco Corporation
InventorsKeiji Nomaru, Yuji Hadano
Estimating the term…
A laser processing apparatus has a liquid supply mechanism disposed at an upper portion of a holding unit. The liquid supply mechanism includes: a pool adapted to form a layer of a liquid on an upper surface of a workpiece held by a holding table; a transparent plate disposed such as to make contact with the layer of the liquid; a jet nozzle adapted to jet the liquid by positioning a jet port between an upper surface of the workpiece and the transparent plate toward an application position of a laser beam applied to the workpiece through the transparent plate; a liquid supply nozzle adapted to supply the liquid from one side of the pool; and a liquid discharge nozzle adapted to discharge the liquid from the other side of the pool.
A laser processing apparatus comprising:
Dependencies are inferred from the claim text.