Field emission devices and methods of making thereof
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Damian Sojka, Andre Schmenn, Carsten Ahrens
Life of this patent
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Abstract
In one embodiment of the present invention, an electronic device includes a first emitter/collector region and a second emitter/collector region disposed in a substrate. The first emitter/collector region has a first edge/tip, and the second emitter/collector region has a second edge/tip. A gap separates the first edge/tip from the second edge/tip. The first emitter/collector region, the second emitter/collector region, and the gap form a field emission device.
Claims20
A method of forming an electronic device, the method comprising:
- forming a first trench and a second trench in a substrate;
- and
- forming a first edge/tip and a second edge/tip by forming a first cavity under the first trench and a second cavity under the second trench, wherein the first cavity intersects with the second cavity to form the first edge/tip and the second edge/tip, wherein the first edge/tip is above and opposite the second edge/tip, and wherein the first edge/tip and the second edge/tip form part of a first field emission device;
- before forming the first edge/tip and the second edge/tip, forming first isolation liner on sidewalls of the first trench and a second isolation liner on sidewalls of the second trench;
- forming a capping layer over and completely sealing the first trench and the second trench, the capping layer being structurally coupled to the first edge/tip;
- forming a contact over the substrate and through the capping layer after forming the first cavity under the first trench and the second cavity under the second trench;
- and
- forming a third edge/tip in a central bottom portion of the first cavity.
A method of forming an electronic device, the method comprising:
- forming a first trench and a second trench in a substrate;
- and
- forming a first edge/tip and a second edge/tip by forming a first cavity under the first trench and a second cavity under the second trench, wherein the first cavity intersects with the second cavity to form the first edge/tip and the second edge/tip, wherein the first edge/tip is opposite the second edge/tip, and wherein the first edge/tip and the second edge/tip form part of a first field emission device;
- before forming the first edge/tip and the second edge/tip, forming first isolation liner on sidewalls of the first trench and a second isolation liner on sidewalls of the second trench;
- forming a capping layer over and sealing the first trench and the second trench;
- forming a contact over the substrate and through the capping layer after forming the first cavity under the first trench and the second cavity under the second trench;
- and
- forming a third edge/tip in a central bottom portion of the first cavity.
Dependencies are inferred from the claim text.