Substrate stocker and systems management software
AssigneeMurata Machinery, Ltd.
InventorsGerhard Dovids, Yves Fenner, John Fiddes, Christian Wohanka, Bernd Rahrbach
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AssigneeMurata Machinery, Ltd.
InventorsGerhard Dovids, Yves Fenner, John Fiddes, Christian Wohanka, Bernd Rahrbach
Estimating the term…
A substrate production, manufacturing, and processing system includes storages with one or more separations that store substrates, loading stations that include robots, opener systems, and a software management system. The storage separations hold first containers that store carriers and the substrates in stacks. Each robot is able to access and move at least one of: the first container, a second container or carrier, and one of the substrates. The opener systems open the first containers such that the carriers and the substrates are able to be accessed by the robots in the loading station, and the software management system assigns at least one category to each stack of carriers and the substrates. The first containers store the substrates with a higher density than the second container or carrier, and the opener systems each include effectors that each hold an individual one of the substrates.
A substrate processing, manufacturing, or storage system comprising:
A software management method to manage a substrate storage, comprising:
Dependencies are inferred from the claim text.