Curable composition for optical imprinting and pattern forming method
AssigneeFUJIFILM Corporation
InventorsHirotaka Kitagawa, Yuichiro Goto
Life of this patent
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AssigneeFUJIFILM Corporation
InventorsHirotaka Kitagawa, Yuichiro Goto
Estimating the term…
A curable composition for optical imprinting which is excellent in ink jet adequacy and releasability, a pattern forming method, a fine pattern, and a method for manufacturing a semiconductor device are provided. The curable composition for optical imprinting contains a polymerizable compound (A), a photopolymerization initiator (B), and a compound (C) expressed by General Formula (I); in General Formula (I), A represents a dihydric to hexahydric polyhydric alcohol residue. p represents 0 to 2, l q represents 1 to 6, p+q represents an integer of 2 to 6, each of m and n independently represents 0 to 20. r expressed by Formula (1) is 6 to 20. Each R independently represents an alkyl group having 1 to 10 carbon atoms, an aryl group, or an acyl group.
A curable composition for optical imprinting, comprising:
Dependencies are inferred from the claim text.