Staggered-type tunneling field effect transistor
AssigneesTaiwan Semiconductor Manufacturing Company, Ltd., National Chiao Tung University
InventorsSteve S. Chung, E. Ray Hsieh, Kuan-Yu Chang
Life of this patent
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Abstract
The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
Claims14
A method for forming a tunneling field effect transistor comprising:
- forming a doped region formed in a semi-conductive substrate;
- depositing an epitaxial layer comprising an overlapping region overlapping the doped region, the overlapping region extending over the doped region in a direction perpendicular with a major surface of the semi-conductive substrate, the overlapping region having a first edge directly over an edge of the doped region in the direction perpendicular with the major surface of the semi-conductive substrate, the overlapping region having a second edge opposite the first edge at an edge of the epitaxial layer, wherein a topmost surface of the overlapping region of the epitaxial layer is above a topmost surface of the doped region;
- forming a dielectric layer over the doped region, wherein the dielectric layer contacts the doped region and extends above the epitaxial layer;
- and
- forming a gate adjacent to the overlapping region, wherein the gate covers the topmost surface of the overlapping region in the direction perpendicular with the major surface of the semi-conductive substrate, and wherein the gate covers a side surface of the overlapping region in a direction parallel with the major surface of the semi-conductive substrate;
- wherein the doped region serves as a source or drain and the epitaxial layer serves as the other of the source or drain of the tunneling field effect transistor.
A method for forming a tunneling field effect transistor comprising:
- forming a doped region in a substrate;
- forming a dielectric layer on the substrate;
- epitaxially growing an epitaxial region physically contacting a semiconductor material of the substrate, the epitaxial region partially overlapping the doped region, wherein the dielectric layer masks a portion of the doped region while epitaxially growing the epitaxial region over the substrate;
- forming a gate structure laterally above the doped region and the epitaxial region, wherein the epitaxial region is interposed between a first portion of the gate structure and the doped region, and wherein the gate structure extends over a side surface of the epitaxial region and below an uppermost surface of the epitaxial layer;
- and
- forming a contact extending through the dielectric layer and electrically connected to the doped region.
A method for forming a tunneling field effect transistor comprising:
- forming a first mask over a substrate;
- forming a doped region in the substrate using the first mask as a mask;
- removing the first mask;
- forming a first dielectric layer over the doped region, a first portion of the doped region being exposed through the first dielectric layer;
- after forming the first dielectric layer, forming an epitaxial region using the first dielectric layer as a mask, an overlapping portion of the epitaxial region overlapping the first portion of the doped region, wherein the epitaxial region contacts the doped region, and wherein a top surface of the first dielectric layer is disposed above a top surface of the epitaxial region and a top surface of the doped region;
- forming a gate structure over the overlapping portion;
- and
- forming a second dielectric layer adjacent the gate structure, the gate structure being interposed between the first dielectric layer and the second dielectric layer.
Dependencies are inferred from the claim text.