Cooled reflective adapter plate for a deposition chamber

An adapter plate for a deposition chamber, the adapter plate comprising:

• a body having a first side disposed in a first plane and a second side opposite the first side;
• a first sidewall coupled to the first side, the first sidewall disposed in a second plane that is substantially orthogonal to the first plane, the first sidewall having a plurality of radial recesses including an opening formed therethrough in a radial direction relative to a longitudinal axis of the body configured to receive a lamp mounting device, and each of the plurality of radial recesses are connected to a bore formed in the body in a tangential relation to the longitudinal axis, one of the radial recesses being spaced by about 180 degrees from another of the radial recesses, wherein the body further includes a plurality of through-holes formed in the first sidewall in a direction parallel to the longitudinal axis, and a plurality of axial recesses and a linear groove are formed in the first sidewall, the linear groove being positioned in a tangential relation to the longitudinal axis, wherein the linear groove is connected to the bore and the bore extends between the opening and the first sidewall;
• a second sidewall coupled to the second side, the second sidewall disposed parallel to the second plane;
• and
• a flange coupled intermediate of the first sidewall and the second sidewall and extending radially outward of both of the first sidewall and the second sidewall.

An adapter plate for a deposition chamber, the adapter plate comprising:

• a body comprising a first annular portion having a first side disposed in a first plane and a second annular portion having a second side parallel to the first plane and opposite the first side, wherein a plurality of axial recesses configured to receive a fastener fixture and a bore adapted to receive an electrical connector, and an elongated channel to receive electrical cables is formed in in an inwardly extending surface of the first annular portion;
• a first sidewall coupled to the first side, the first sidewall disposed in a second plane that is substantially orthogonal to the first plane, and a plurality of through-holes formed in the first sidewall in a direction parallel to a longitudinal axis of the body;
• a second sidewall coupled to the second side, the second sidewall disposed parallel to the second plane;
• and
• a flange coupled intermediate of the first sidewall and the second sidewall and extending radially outward of both of the first sidewall and the second sidewall, the outwardly extending flange having at least a portion of a thermal control channel formed therein, wherein the second annular portion comprises a planar surface that is disposed at an obtuse angle relative to the second side, and wherein the first annular portion includes a radial recess having an opening formed through the first annular portion in a radial direction relative to the longitudinal axis of the body, the opening adapted to receive a lamp mounting device, wherein the bore and the elongated channel are connected and extend between the opening and the first sidewall.