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US 10,504,695 B2Granted
Charged particle beam device and phase plate
AssigneeHitachi High-Technologies Corporation
InventorArthur Malcolm Blackburn
Life of this patent
Estimating the term…
Abstract
A charged particle beam device includes: a first charged particle source that generates first charged particles and irradiates a sample with the generated first charged particles; a phase plate that changes phases of the first charged particles in accordance with charged states of portions through which the first charged particles are transmitted; and a phase plate control system that controls the charging of the phase plate.
Claims16
A charged particle beam device comprising:
- a first charged particle source that generates first charged particles and irradiates a sample with the generated first charged particles;
- a phase plate that changes phases of the first charged particles in accordance with charged states of portions through which the first charged particles are transmitted;
- and
- a phase plate control system that controls the charging of the phase plate,
- wherein the phase plate control system includes at least one of a second charged particle source generating second charged particles or a photon source generating a photon flux, and
- the phase plate control system controls the charging of the phase plate with irradiation of at least one of the second charged particles or the photon flux.
3 more elements
A phase plate comprising:
- a phase plate that changes phases of first charged particles to be irradiated to a sample from a charged particle source in accordance with charged states of portions through which the first charged particles are transmitted;
- a member of an incomplete conductor;
- and
- a second member, wherein the second member is one of a conduction member or a photoconductive member.
1 more element
A phase plate, comprising:
- a phase plate that changes phases of first charged particles to be irradiated to a sample from a charged particle source in accordance with charged states of portions through which the first charged particles are transmitted;
- a substrate formed of a first material;
- an island part formed in a part of the substrate using a second material different from the first material;
- and
- a conduction layer covering surfaces of the substrate and the island part.
2 more elements
Dependencies are inferred from the claim text.