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AssigneeTESCAN Brno, s.r.o.
InventorsJaroslav Jiruse, Filip Lopour, Milos Havelka, Jan Polster, Josef Rysavka, Martin Zadrazil
Estimating the term…
A scanning electron microscope comprises three objective lenses, including a distant objective lens and a close objective lens, which are of conventional type, and an immersion objective lens of the immersion type below the distant objective lens and the close objective lens. These three objective lenses can be controlled independently, therefor different combinations of active objective lenses can be achieved. The scanning electron microscope therefore offers various imaging modes. There is a possibility to switch between these imaging modes and therefore, choose the most suitable way of imaging for given application.
A scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, and a close objective lens arranged between the distant objective lens and the immersion objective lens, wherein the objective lenses are configured to be controlled to cause at least one of the objective lenses to be active while at least another one of the objective lenses in inactive.
A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, characterized in that it further comprises a close objective lens arranged between the distant objective lens and the immersion objective lens, comprising the step of:
A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, and a close objective lens arranged between the distant objective lens and the immersion objective lens, the method comprising the steps of:
A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, characterized in that it further comprises a close objective lens arranged between the distant objective lens and the immersion objective lens, the method comprising the steps of:
A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, characterized in that it further comprises a close objective lens arranged between the distant objective lens and the immersion objective lens, the method comprising the steps of:
A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, characterized in that it further comprises a close objective lens arranged between the distant objective lens and the immersion objective lens, the method comprising the steps of:
A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, characterized in that it further comprises a close objective lens arranged between the distant objective lens and the immersion objective lens, the method comprising the steps of:
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