Sample holder and electron microscope
AssigneeJEOL Ltd.
InventorsKazuki Yagi, Takeo Sasaki, Ichiro Onishi, Shuichi Yuasa, Masashi Shimizu
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Abstract
A sample holder capable of limiting X-rays accepted into an X-ray detector is provided. The sample holder is for use in an electron microscope equipped with a polepiece assembly and a semiconductor detector. The sample holder includes: a sample stage on which a sample is held; and a shield plate. When the sample stage has been introduced in the sample chamber of the electron microscope, the shield plate is located between the polepiece assembly and the semiconductor detector.
Claims6
A sample holder for use in or with an electron microscope having an objective lens and at least one X-ray detector, the objective lens including a polepiece assembly, said sample holder comprising:
- a sample stage on which a sample is held;
- a shield plate which is placed between the polepiece assembly and the X-ray detector when the sample stage has been introduced in a sample chamber of the electron microscope;
- and
- a shaft portion and a frame mounted on a front end of the shaft portion, and wherein said sample stage is mounted to the frame,
- wherein said polepiece assembly has a top polepiece and a bottom polepiece,
- said sample stage is inserted between the top polepiece and the bottom polepiece, and
- said shield plate is located between the bottom polepiece and said X-ray detector when the sample stage has been introduced in said sample chamber, and
- wherein said shield plate is mounted to said frame, and wherein the shield plate protrudes from the frame toward a side of said bottom polepiece when said sample stage has been introduced in said sample chamber.
Dependencies are inferred from the claim text.