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US 10,503,081 B2Granted
Carrying platform and exposure method
AssigneeBoe Technology Group Co., Ltd.
InventorsChunlong Yan, Jianjun Li, Xin Bai, Guiqi Liu
Life of this patent
Estimating the term…
Abstract
A carrying platform and an exposure method are provided. The carrying platform includes: a plurality of sub-stands, configured to co-carry an object. Each sub-stand includes: a platform having a first carrying surface; and a position adjusting unit disposed on a side of the platform away from the first carrying surface and configured to adjust at least one of height or inclined angle of the platform.
Claims18
A carrying platform, comprising:
- a plurality of sub-stands, configured to co-carry an object;
- wherein each sub-stand includes:
- a platform, having a first carrying surface;
- and
- a position adjusting unit, disposed on a side of the platform away from the first carrying surface and configured to adjust inclined angle of the platform,
- the carrying platform further comprise:
- a control unit, in communication with the position adjusting units of the respective plurality of sub-stands;
- wherein the control unit is configured to control the position adjusting unit of the respective sub-stands.
5 more elements
An exposure method, comprising:
- providing a carrying platform including a plurality of sub-stands, configured to co-carry an object;
- wherein each sub-stand includes:
- a platform, having a first carrying surface and a position adjusting unit, disposed on a side of the platform away from the first carrying surface and configured to adjust inclined angle of the platform, and the carrying platform further comprise:
- a control unit, in communication with the position adjusting units of the respective plurality of sub-stands, wherein the control unit is configured to control the position adjusting unit of the respective sub-stands;
- placing an object to be exposed on the first carrying surface of the plurality of sub-stands;
- disposing a mask on a side of the object to be exposed away from the carrying platform;
- and
- controlling the position adjusting unit of at least one of the sub-stands by the control unit to adjust the inclined angle of the platform so as to adjust a gap between the mask and a portion of the object to be exposed.
5 more elements
Dependencies are inferred from the claim text.