Method for manufacturing light guide elements
AssigneeWaymo LLC
InventorsBernard Fidric, Pierre-yves Droz, David Hutchison
Life of this patent
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AssigneeWaymo LLC
InventorsBernard Fidric, Pierre-yves Droz, David Hutchison
Estimating the term…
Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example method includes overlaying a first mask on a photoresist material and a substrate, and causing a light source to illuminate the photoresist material through the first mask during a first exposure so as to define a first feature. During the first exposure, the light source is positioned at a non-normal angle with respect to a plane parallel to the substrate. The method includes developing the photoresist material so as to retain an elongate portion of the photoresist material on the substrate. A first end of the elongate portion includes an angled portion that is sloped at an angle with respect to a long axis of the elongate portion. The method also includes depositing a reflective material through a second mask onto the angled portion.
A method comprising:
A method comprising:
Dependencies are inferred from the claim text.