Photo alignment device, photo alignment method and alignment film preparation system

photo alignment device, for performing photo alignment on at least one film-to-be-aligned layer formed on a substrate by spraying, comprising:

• a photo alignment unit, a temperature acquisition unit and a control unit,
• the photo alignment unit is configured to perform preheating, curing and photo alignment on the film-to-be-aligned layer formed on the substrate by spraying;
• the temperature acquisition unit is configured to perform real-time acquisition on temperatures of the film-to-be-aligned layer during preheating, curing, and photo alignment in synchronization with the photo alignment unit, and to feed the acquired temperatures back to the control unit;
• and
• the control unit is configured to determine whether the fed back temperatures are within preset ranges of temperature, and to adjust position, power and for speed of the photo alignment unit based on the determination result, to cause the temperatures of the film-to-be-aligned layer during preheating, curing, and photo alignment to be within their respective preset ranges of temperature;
• wherein the photo alignment unit comprises a first rack and a light source provided on the first rack, the control unit comprises a control module, the first rack and the light source each are connected to the control module;
• the first rack can move back and forth in a direction perpendicular to a board face of the substrate, and can move from one end of the substrate to another end opposite thereto in parallel to the board face of the substrate, under the control of the control module;
• and
• the light source can emit light of different illuminances under the control of the control module, to perform preheating, curing and photo alignment on the film-to-be-aligned layer formed on the substrate by spraying.