Testing equipment for semiconductor element and its carrying device

A carrying device, comprising:

• a main body comprising a moving arm and a pressing portion connected to one end of the moving arm;
• a grasping portion connected to the main body and disposed on one end of the pressing portion opposite to the moving arm, for grasping a semiconductor element;
• a heat-exchanging module disposed on the main body, and disposed in the moving arm;
• and
• a gas chamber device, comprising:
• a case body disposed between the grasping portion and the heat-exchanging module, and disposed in the pressing portion and the moving arm, wherein the case body has a closed chamber therein;
• and
• a gas filling the closed chamber for transferring heat from the semiconductor element to the heat exchanging module, wherein a specific heat capacity of the gas is substantially in a range from 5000 J/(kg·K) to 15000 J/(kg·K).