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US 10,502,761 B2Granted
Method and apparatus of operating a scanning probe microscope
AssigneeBruker Nano, Inc.
InventorsYan Hu, Shuiqing Hu, Chanmin Su
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Abstract
An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
Claims7
A method of operating a scanning probe microscope (SPM) comprising:
- interacting a tip of a probe of the SPM with a sample;
- then
- terminating the interaction, resulting in a decaying probe oscillation;
- repeating the interaction before ringdown of the decaying probe oscillation is substantially complete;
- and
- detecting motion of the probe during the interaction step;
- determining an instantaneous force on the tip based on the detecting step;
- using the instantaneous force as a feedback control parameter to operate the SPM;
- and
- further comprising determining a synchronization distance and using the synchronization distance to determine the instantaneous force.
7 more elements
Dependencies are inferred from the claim text.