US 10,502,702 B2 · Capacitor type humidity sensor

Abstract

A capacitor type humidity sensor may include a semiconductor substrate comprising a humidity sensing region and a peripheral circuit region, a sensing capacitor disposed on the humidity sensing region and the sensing capacitor comprising a humidity sensitive layer, a dielectric layer made of a material different than from the humidity sensitive layer, and a reference capacitor configured to provide a reference capacitance value, wherein the sensing capacitor and the reference capacitor are disposed on different planes from each other. A reference capacitor is disposed at an arbitrary region under a sensing capacitor among a humidity sensing region or at a peripheral circuit region. The reference capacitor is a metal-insulator-metal (MIM) capacitor or a polysilicon-insulator-polysilicon (PIP) capacitor.

Claims25

Dependent claims

A capacitor type humidity sensor comprising:

a semiconductor substrate comprising a humidity sensing region;
a sensing capacitor, disposed in the humidity sensing region, comprising:
a humidity sensitive layer;
upper electrodes comprising a first electrode and a second electrode;
and
a bottom electrode disposed under, and connected to, the second electrode;
and
a reference capacitor comprising a first reference electrode and a second reference electrode,
wherein a plurality of sections of the first reference electrode corresponds to a single section of the second reference electrode,
the sensing capacitor and the reference capacitor are disposed on different planes from each other, and
the humidity sensitive layer is disposed on and between the first electrode and the second electrode.

8 more elements

Dependencies are inferred from the claim text.

Capacitor type humidity sensor

Life of this patent

Capacitor type humidity sensor

Life of this patent

Abstract

Claims25