X-ray apparatus and structure production method

An X-ray apparatus, comprising:

• a mounting unit upon which an object to be measured is mounted;
• an X-ray generator that irradiates X-rays, from above the mounting unit or from below the mounting unit, to the object to be measured that is mounted upon the mounting unit;
• a mark for magnification measurement that is formed upon a mounting surface of a region or upon an underside surface of the region of the mounting unit, the object to be measured being mounted on the region of the mounting unit;
• an X-ray detector that acquires a transmission image of the object to be measured and a transmission image of the mark for magnification measurement, which are being irradiated by the X-rays;
• a first movement unit that moves at least one of the mounting unit, the X-ray generator, and the X-ray detector along a direction of irradiation of the X-rays;
• and
• a calculator that calculates a magnification of a transmission image of the object to be measured based on a transmission image of the mark for magnification measurement, wherein the transmission image of the object to be measured and the transmission image of the mark for magnification measurement detected by the X-ray detector appear upon the same projection image.

An X-ray apparatus, comprising:

• a mounting unit upon which an object to be measured is mounted;
• an X-ray generator that irradiates X-rays, from above the mounting unit or from below the mounting unit, to the object to be measured that is mounted upon the mounting unit;
• a mark for magnification measurement that is formed upon a mounting surface or upon an underside surface of the mounting unit;
• an X-ray detector that acquires a transmission image of the object to be measured and a transmission image of the mark for magnification measurement, which are being irradiated by the X-rays;
• a first movement unit that moves at least one of the mounting unit, the X-ray generator, and the X-ray detector along a direction of irradiation of the X-rays;
• a position detector that detects a relative position of the mounting unit, the X-ray generator, and the X-ray detector;
• a first calculator that calculates a magnification of a transmission image of the object to be measured based on the relative position detected by the position detector;
• a second calculator that calculates the magnification of a transmission image of the object to be measured based on a transmission image of the mark for magnification measurement acquired by the X-ray detector;
• and
• a control unit that selects either the first calculator or the second calculator to calculate the magnification of the object to be measured;
• and wherein
• when the magnification corresponding to the relative position detected by the position detector is smaller than a predetermined value, the control unit causes the first calculator to calculate the magnification of the object to be measured, and when the magnification corresponding to the relative position detected by the position detector is greater than the predetermined value, the control unit causes the second calculator to calculate the magnification of the object to be measured.