Automated metrology system selection

An automated measurability ranking tool comprising computer-readable instructions stored on a non-transitory, computer-readable medium, the computer-readable instructions comprising:

• code for causing a computing system to receive a measurement model indicative of a measurement of a parameter of interest by a metrology system at a plurality of measurement scenarios, wherein each of the plurality of measurement scenarios includes different values of an angle of incidence, azimuth angle, illumination wavelength, polarization state, or any combination thereof;
• code for causing the computing system to determine a subset of the plurality of measurement scenarios that increases a reliability and sensitivity of the measurement to the parameter of interest;
• code for causing the computing system to determine a set of Design of Experiments (DOE) measurement data associated with a simulation of the measurement for a range of known values of the parameter of interest and the subset of the plurality of measurement scenarios;
• code for causing the computing system to estimate values of the parameter of interest by solving a measurement model on the set of DOE measurement data corresponding to each of the known values of the parameter of interest;
• code for causing the computing system to determine one or more indications of a difference between the known values of the parameter of interest and the estimated values of the parameter of interest;
• code for causing the computing system to determine one or more measurement performance metrics indicative of the measurement performance of one or more of the subset of the plurality of measurement scenarios based on the indications of the difference between the known values and the estimated values of the parameter of interest;
• code for causing the computing system to communicate the measurement performance metrics to a user;
• code for causing the computing system to receive an indication of a selection of a measurement scenario by the user;
• code for causing the computing system to generate a measurement system configuration based on the selection;
• and
• code for causing the computing system to perform a measurement based on the measurement system configuration.

A method comprising:

• receiving a measurement model indicative of a measurement of a parameter of interest by a metrology system at a plurality of measurement scenarios, wherein each of the plurality of measurement scenarios includes different values of an angle of incidence, azimuth angle, illumination wavelength, polarization state, or any combination thereof;
• determining a subset of the plurality of measurement scenarios that increases a reliability and sensitivity of the measurement to the parameter of interest;
• determining a set of Design of Experiments (DOE) measurement data associated with a simulation of the measurement for a range of known values of the parameter of interest and the subset of the plurality of measurement scenarios;
• estimating values of the parameter of interest by solving a measurement model on the set of DOE measurement data corresponding to each of the known values of the parameter of interest;
• determining one or more indications of a difference between the known values of the parameter of interest and the estimated values of the parameter of interest;
• determining one or more measurement performance metrics indicative of the measurement performance of one or more of the subset of the plurality of measurement scenarios based on the indications of the difference between the known values and the estimated values of the parameter of interest;
• communicating the measurement performance metrics to a user;
• receiving an indication of a selection of a measurement scenario by the user;
• generating a measurement system configuration based on the selection;
• and
• performing a measurement based on the measurement system configuration.