Inertial sensing systems and methods of manufacturing the same

An inertial sensing system, comprising:

• a substrate;
• a gyroscope mechanically coupled to the substrate by an anchor, wherein the gyroscope is circular in shape and defines a central opening, and wherein the gyroscope comprises:
• a plurality of gyroscope spring elements coupled to the anchor;
• a gyroscope proof mass, wherein the gyroscope proof mass comprises a plurality of concentric rings operatively coupled to the plurality of gyroscope spring elements, and wherein the gyroscope proof mass encircles the plurality of gyroscope spring elements;
• a plurality of gyroscope electrodes to sense an angular rate of the gyroscope proof mass;
• an accelerometer positioned within the central opening, wherein the accelerometer comprises:
• a plurality of accelerometer spring elements;
• an accelerometer body portion coupled to the substrate through the plurality of accelerometer spring elements and not through the gyroscope proof mass;
• and
• a plurality of accelerometer electrodes to sense an acceleration of the accelerometer body portion,
• wherein the gyroscope and the accelerometer are configured to be independently operable.