Method and apparatus for measuring errors of movable platform in multiple degrees of freedom

A method for measuring errors of a movable platform in multiple degrees of freedom, comprising steps of:

• a light-source module emitting a beam of light to a first spectroscope disposed on a movable platform;
• said first spectroscope forming a first split beam and a second split beam, said first split beam incident to a second spectroscope disposed on said movable platform;
• said second spectroscope forming a third split beam and a fourth split beam, said third split beam incident to a polarizing spectroscope disposed on said movable platform;
• said polarizing spectroscope forming a fifth split beam and a sixth split beam, said fifth split beam incident to a reflecting lens disposed on said movable platform;
• said first reflecting lens reflecting said fifth split beam to a first lens disposed on said movable platform, and said fifth split beam passing through said first lens and projected to a first optoelectronic sensing module;
• and
• a processing unit calculating to give the Y-axis alignment error of said movable platform according to the centroid coordinates of a first light spot generated by projecting said fifth split beam on said first optoelectronic sensing module.

A method for measuring errors of a movable platform in multiple degrees of freedom, comprising steps of:

• a light-source module emitting a beam of light to a first spectroscope disposed on a movable platform;
• said first spectroscope forming a first split beam and a second split beam, said first split beam incident to a second spectroscope disposed on said movable platform;
• said second spectroscope forming a third split beam and a fourth split beam, said third split beam incident to a polarizing spectroscope disposed on said movable platform;
• said polarizing spectroscope forming a fifth split beam and a sixth split beam, said sixth split beam passing through a quarter wavelength plate disposed on said movable platform and incident to a corner cube prism disposed on said movable platform, and said corner cube prism reflecting said sixth split beam to enable said sixth split beam incident to a second optoelectronic sensing module;
• and
• a processing unit calculating to give the X-axis straightness error or/and the Z-axis straightness error of said movable platform according to the centroid coordinates of a second light spot generated by projecting said sixth split beam on said second optoelectronic sensing module.

A method for measuring errors of a movable platform in multiple degrees of freedom, comprising steps of:

• a light-source module emitting a beam of light to a first spectroscope disposed on a movable platform;
• said first spectroscope forming a first split beam and a second split beam, said first split beam incident to a second spectroscope disposed on said movable platform;
• said second spectroscope forming a third split beam and a fourth split beam, said fourth split beam incident to a second reflecting lens disposed on said movable platform, said second reflecting lens reflecting said fourth split beam to a first vertical reflecting lens or a first vertical reflecting lens set disposed on said movable platform, said fourth split beam reflecting in said first vertical reflecting lens or said first vertical reflecting lens set for two or more times, and said fourth split beam emerging vertically to a fourth optoelectronic sensing module;
• said second split beam incident to a second vertical reflecting lens or a second vertical reflecting lens set disposed on said movable platform, said second split beam reflecting in said second vertical reflecting lens or said second vertical reflecting lens set for two or more times, and said second split beam emerging vertically to a third optoelectronic sensing module;
• and
• a processing unit calculating to give the X-axis angle error or/and the Y-axis angle error or/and the Z-axis angle error of said movable platform according to the signal generated by said fourth optoelectronic sensing module upon receiving said fourth split beam and the signal generated by said third optoelectronic sensing module upon receiving said second split beam.

An apparatus for measuring errors of a movable platform in multiple degrees of freedom, comprising:

• a fixed platform, including a light-source module and one or more optoelectronic sensing module;
• a movable platform, including:
• a first spectroscope, disposed on said movable platform and corresponding to said light-source module, said light-source module emitting a beam of light to said first spectroscope, and said first spectroscope forming a first split beam and a second split beam;
• a second spectroscope, disposed on one side of said first spectroscope, said first split beam incident to said second spectroscope, and said second spectroscope forming a third split beam and a fourth split beam;
• a polarizing spectroscope, disposed on one side of said second spectroscope, said third split beam incident to said polarizing spectroscope, and said polarizing spectroscope forming a fifth split beam and a sixth split beam;
• a first reflecting lens, disposed on one side of said polarizing spectroscope, and reflecting said fifth split beam;
• a first lens, disposed on one side of said first reflecting lens, and said fifth split beam passing through said first lens;
• and
• a processing unit, connected electrically with said one or more optoelectronic sensing module;
• where after said fifth split beam passes through said first lens, said fifth split beam projects to a first optoelectronic sensing module in said one or more optoelectronic sensing module;
• and said processing unit calculates to give the Y-axis alignment error of said movable platform according to the centroid coordinates of a first light spot formed by projecting said fifth split beam on said first optoelectronic sensing module.

An apparatus for measuring errors of a movable platform in multiple degrees of freedom, comprising:

• a fixed platform, including a light-source module and one or more optoelectronic sensing module;
• a movable platform, including:
• a first spectroscope, disposed on said movable platform and corresponding to said light-source module, said light-source module emitting a beam of light to said first spectroscope, and said first spectroscope forming a first split beam and a second split beam;
• a second spectroscope, disposed on one side of said first spectroscope, said first split beam incident to said second spectroscope, and said second spectroscope forming a third split beam and a fourth split beam;
• a polarizing spectroscope, disposed on one side of said second spectroscope, said third split beam incident to said polarizing spectroscope, and said polarizing spectroscope forming a fifth split beam and a sixth split beam;
• a quarter wavelength plate, disposed on one side of said polarizing spectroscope, and said sixth split beam passing through said quarter wavelength plate;
• and
• a corner cube prism, disposed on one side of said quarter wavelength plate, and said sixth split beam passing through said corner cube prism;
• a processing unit, connected electrically with said one or more optoelectronic sensing module;
• where after said corner cube prism reflects said sixth split beam to pass through said quarter wavelength plate and said polarizing spectroscope, said sixth split beam projects to a second optoelectronic sensing module of said one or more optoelectronic sensing module;
• and said processing unit calculates to give the X-axis straightness error or/and Z-axis straightness error of said movable platform according to the centroid coordinates of a second light spot formed by projecting said sixth split beam on said second optoelectronic sensing module.

An apparatus for measuring errors of a movable platform in multiple degrees of freedom, comprising:

• a fixed platform, including a light-source module and one or more optoelectronic sensing module;
• a movable platform, including:
• a first spectroscope, disposed on said movable platform and corresponding to said light-source module, said light-source module emitting a beam of light to said first spectroscope, and said first spectroscope forming a first split beam and a second split beam;
• a second spectroscope, disposed on one side of said first spectroscope, said first split beam incident to said second spectroscope, and said second spectroscope forming a third split beam and a fourth split beam;
• a second reflecting lens, disposed on one side of said second spectroscope, and reflecting said fourth split beam;
• a first vertical reflecting lens or a first vertical reflecting lens set, disposed on one side of said second reflecting lens, and said fourth split beam reflecting in said first vertical reflecting lens or said first vertical reflecting lens set for two or more times before emerging vertically;
• and
• a second vertical reflecting lens or a second vertical reflecting lens set, disposed on one side of said first spectroscope, and said second split beam reflecting in said second vertical reflecting lens or said second vertical reflecting lens set for two or more times before emerging vertically;
• and
• a processing unit, connected electrically with said one or more optoelectronic sensing module;
• where said first vertical reflecting lens or said first vertical reflecting lens set emits said fourth split beam to a fourth optoelectronic sensing module of said one or more optoelectronic sensing module;
• said second vertical reflecting lens or said second vertical reflecting lens set emits said second split beam to a third optoelectronic sensing module of said one or more optoelectronic sensing module;
• and said processing unit calculates to give the X-axis angle error or/and Y-axis angle error or/and Z-axis angle error of said movable platform according to the signal generated by said third optoelectronic sensing module upon receiving said second split beam and the signal generated by said fourth optoelectronic sensing module upon receiving said fourth split beam.