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US 10,502,556 B2Granted
Systems and methods for 3D surface measurements
AssigneeMura Inc.
InventorsLingfei Meng, Jun Jiang
Life of this patent
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Abstract
Certain embodiments are directed to 3D surface measurement systems and methods configured to direct engineered illumination of beams in one or more ray bundles to N illumination directions incident a sample surface. The systems and methods can measure a map of surface normals, a depth map, and a map of surface properties using intensity images captured while the engineered illumination is directed to the sample surface.
Claims26
A 3D surface measurement system comprising:
- an engineered illumination system configured to provide at least one ray bundle sequentially at N illumination directions incident a surface of a sample being imaged, wherein each ray bundle comprises illumination beams of various intensities, the illumination beams of each ray bundle configured in different directions converging toward the surface of the sample during operation;
- a first camera with an imaging lens and at least one sensor configured to acquire intensity images based on light received from the illuminated sample, each intensity image acquired while the at least one ray bundle is directed at one of the N illumination directions;
- and
- a controller configured to execute instructions to:
- determine a sensor response at each sensor pixel of a plurality of sensor pixels of the at least one sensor, the sensor response determined from the intensity images corresponding to the N illumination directions;
- match the sensor response at each sensor pixel to one of a plurality of predetermined sensor responses to determine a surface normal at each sensor pixel;
- and
- construct a map of surface normals of the surface of the sample by combining the determined surface normals of the plurality of sensor pixels of the at least one sensor.
5 more elements
A 3D surface measurement method comprising:
- receiving a plurality of intensity images of a sample in a signal from at least one sensor of a camera, the plurality of intensity images captured at a plurality of exposure times, each intensity image acquired while one or more ray bundles is directed at one of N illumination directions, each ray bundle comprising illumination beams of various intensities, the illumination beams of each ray bundle directed in different directions converging toward the surface of the sample;
- determining a sensor response at each sensor pixel of a plurality of sensor pixels of the at least one sensor, the sensor response determined from the intensity images at the N illumination directions;
- matching a sensor response at each sensor pixel to one of a plurality of predetermined sensor responses to determine a surface normal at each sensor pixel;
- and
- construct a map of surface normals of the surface of the sample by combining the determined surface normals of the plurality of sensor pixels of the at least one sensor.
2 more elements
A 3D surface measurement method comprising:
- a) engineering at least one ray bundle directed sequentially to N illumination directions incident a surface a sample being imaged, each ray bundle comprising illumination beams of various intensities, the illumination beams of each ray bundle directed in different directions converging toward the surface of the sample;
- b) acquiring, using at least one sensor of a camera, intensity images at a plurality of exposure times based on light from the illuminated sample, each intensity image acquired while the one or more ray bundles is directed at one of the N illumination directions;
- and
- c) communicating the intensity images to one or more processors, wherein the one or more processors determine a sensor response at each sensor pixel of a plurality of sensor pixels of the at least one sensor, the sensor response determined from the intensity images at the N illumination directions, match the sensor response at each sensor pixel to one of a plurality of predetermined sensor responses to determine a surface normal at each sensor pixel, and construct a map of surface normals of the surface of the sample by combining the determined surface normals of the plurality of sensor pixels of the at least one sensor.
1 more element
Dependencies are inferred from the claim text.