Deposition system with modular deposition heads

A deposition unit for a thin film deposition system, comprising:

• a machine base;
• two or more separate deposition heads, each deposition head including:
• an output face having a plurality of gas openings;
• a mounting face opposite to and parallel with the output face, the mounting face including a plurality of deposition head gas ports;
• and
• gas passages connecting each of the gas openings on the output face to one of the deposition head gas ports;
• and
• a gas manifold rigidly attached to the machine base including:
• an attachment face having one or more interface regions, each interface region being configured to interface with the mounting face of a deposition head and including a plurality of manifold gas ports in positions corresponding to the deposition head gas ports;
• a plurality of gas connections;
• and
• gas passages connecting each of the manifold gas ports to one of the gas connections;
• wherein each of the two or more deposition heads is removably fastened to the gas manifold using one or more removable fasteners in an interface region with sealing elements positioned between the one or more deposition heads and the gas manifold to provide sealed connections between the manifold gas ports and the deposition head gas ports;
• wherein the mounting face of each deposition head and the attachment face of the gas manifold include alignment features for aligning each deposition head with the interface region of the gas manifold in a repeatable position.