Plasma erosion resistant rare-earth oxide based thin film coatings

A method of manufacturing an article comprising:

• performing at least one of ion assisted deposition (IAD) or physical vapor deposition (PVD) to deposit a first protective layer on at least one surface of an article, wherein the first protective layer is a thin film that comprises a first ceramic selected from a group consisting of:
• Y3Al5O12 having at least two of a volume resistivity of 11.3E16 Ω·cm +/−up to 30%, a dielectric constant of 9.76 +/− up to 30%, a thermal conductivity of 20.1 W/m·K +/− up to 30%, a hardness of 8.5 Gpa +/− up to 30%, or a hermiticity of 4.4E-10 cm3/s +/− up to 30%,
• Er2O3 having a hardness of 5 Gpa +/− up to 30%,
• Er3Al5O12 having a hardness of 9 Gpa +/− up to 30%, and
• a ceramic compound comprising Y4Al2O9and a solid-solution of Y2O3—ZrO2, the ceramic compound having at least two of a volume resistivity of 4.1E16 Ω·cm +/− up to 30%, a dielectric constant of 9.83 +/− up to 30%, a thermal conductivity of 19.9 W/m·K +/− up to 30%, a hardness of 7.8 Gpa +/− up to 30%, or a hermiticity of 1.2E-9 cm3/s +/− up to 30%;
• and
• forming a plurality of surface features on a surface of the first protective layer, wherein the plurality of surface features are not in the at least one surface of the article, and wherein a thickness of the first protective layer at first locations that include the plurality of surface features is greater than a thickness of the first protective layer at second locations that do not include the plurality of surface features.

A method of manufacturing an article comprising:

• performing at least one of ion assisted deposition (IAD) or physical vapor deposition (PVD) to deposit a first protective layer on at least one surface of an article, wherein the article comprises Al2O3, and wherein the first protective layer is a thin film that comprises a first ceramic selected from a group consisting of:
• Er2O3 having a hardness of 5 Gpa +/− up to 30%, and
• a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2, the ceramic compound having at least two of a volume resistivity of 4.1E16 Ω·cm +/− up to 30%, a dielectric constant of 9.83 +/− up to 30%, a thermal conductivity of 19.9 W/m·K +/− up to 30%, a hardness of 7.8 Gpa +/− up to 30%, or a hermiticity of 1.2E-9 cm3/s +/− up to 30%;
• and
• forming a transition layer between the at least one surface of the article and the first protective layer, wherein the transition layer provides a diffusion bond between the first protective layer and the at least one surface of the article, and wherein:
• the transition layer is Y3Al5O12 if the first protective layer is the ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2, and
• the transition layer is Er3Al5O12 if the first protective layer is the Er2O3.