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US 10,501,311 B2Granted
Micromechanical device having a first cavity and a second cavity
AssigneeRobert Bosch GmbH
InventorMartin Rambach
Life of this patent
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Abstract
A micromechanical device having a first cavity, which has a MEMS element, and having a second cavity. The second cavity is connected to the first cavity with a connection channel, the connection channel having a seal by which the first cavity and the second cavity are hermetically sealed from each other, the seal being able to be opened electrically.
Claims15
A micromechanical device, comprising:
- a first cavity, which has an MEMS element;
- and
- a second cavity, wherein the second cavity is connected to the first cavity with a connection channel;
- wherein the connection channel includes a seal by which the first cavity and the second cavity are hermetically sealed from each other, and
- wherein the seal is openable electrically.
2 more elements
Dependencies are inferred from the claim text.