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US 10,500,696 B2Granted
Method of detecting clogging of chuck table and processing apparatus
AssigneeDisco Corporation
InventorsHideki Matsui, Shigenori Harada
Life of this patent
Estimating the term…
Abstract
A method of detecting clogging of a chuck table includes an imaging step of capturing an image of a holding surface of the chuck table while air and water are being ejected to the holding surface of the chuck table, an image processing step of binarizing the captured image into a binary image, and a decision step of deciding a clogged ratio of the chuck table on the basis of the binary image.
Claims8
A method of detecting clogging of a chuck table for holding a workpiece under suction thereon, the method comprising:
- an ejecting step of ejecting air and water through a holding surface of the chuck table;
- an imaging step of capturing an image of the holding surface of the chuck table while the air and water are being ejected through the holding surface;
- an image processing step of binarizing the captured image into a binary image;
- and
- a decision step of determining a clogged ratio of the chuck table on the basis of the binary image, wherein said clogged ratio is a total area of clogged regions of the holding surface compared to a total area of the holding surface.
2 more elements
A processing apparatus comprising:
- a chuck table holding a workpiece under suction thereon, said chuck table including a holding surface and an ejector, said ejector being configured to eject air and water through the holding surface;
- processing means for processing the workpiece;
- imaging means for capturing an image of a holding surface of the chuck table while air and water are being ejected through the holding surface;
- a binarizer configured for binarizing the captured image into a binary image;
- and
- decision means for deciding a clogged ratio of the chuck table on the basis of the binary image, wherein said clogged ratio is a total area of clogged regions of the holding surface compared to a total area of the holding surface.
3 more elements
Dependencies are inferred from the claim text.