Laser machining systems and methods with vision correction and/or tracking

A laser machining system comprising:

• a part handling system including a workpiece support surface for supporting a workpiece to be machined;
• at least one stationary laser source for generating at least one laser beam;
• at least one laser scanning stage positioned relative to the part handling system for linear movement along a scanning axis, wherein the stationary laser source is not located on the laser scanning stage;
• a movable optical head located on the laser scanning stage and movable relative to the laser source and without moving the laser source, the optical head including a beam delivery system for receiving the beam and modifying the beam while moving;
• a beamsplitter between the stationary laser source and the movable optical head for splitting the at least one beam emitted from the laser source to provide a portion of the at least one beam for tracking;
• a beam position tracking system comprising a position detector for receiving the portion of the at least one laser beam, wherein the position detector is located such that a beam path from the laser source to the position detector is at least as long as a working distance of the laser beam from the laser source to the workpiece;
• and
• a base supporting at least the position tracking system, wherein the portion of the at least one beam from the beamsplitter is wrapped around the base to provide long working distance detection.