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US 10,500,616 B2Granted
In situ cleaning apparatus and system thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLi-Hsing Chien, Yung-Ti Hung, Rouh Jier Wang, Yu-Te Chang
Life of this patent
Estimating the term…
Abstract
An apparatus includes: a sprinkler configured for spraying liquid; a conduit with a nano-particle coated surface; a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface; and a controller coupled with the sensor and the sprinkler, wherein the controller is configured to regulate liquid spraying of the sprinkler over the nano-particle coated surface.
Claims20
An apparatus, comprising:
- a sprinkler configured for spraying liquid;
- a conduit with a nano-particle coated surface;
- a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface;
- and
- a controller coupled with the sensor and the sprinkler, wherein the controller is configured to regulate liquid spraying of the sprinkler over the nano-particle coated surface.
2 more elements
An apparatus, comprising:
- a nozzle configured to spray liquid;
- a conduit having a nano-particle coated film inside the conduit;
- a sensor configured to detect a signal associated with a film deposition on the nano-particle coated film;
- and
- a controller, coupled to the nozzle and the sensor, the controller being configured to regulate liquid spraying of the nozzle over the nano-particle coated film according to the signal received from the sensor.
2 more elements
An apparatus, comprising:
- a nozzle configured to spray liquid;
- a conduit having a nano-particle coated surface;
- a sensor configured to detect a signal associated with a film deposition on the nano-particle coated surface and transmit the signal;
- and
- a controller, coupled to the nozzle and the sensor, the controller being configured to regulate liquid spraying of the nozzle over the nano-particle coated surface according to the signal.
2 more elements
Dependencies are inferred from the claim text.