Developing device and developing method

A developing device for developing a substrate, comprising:

• a developing tank, a recovery box and a conveying unit provided above the developing tank and configured to convey the substrate;
• wherein the developing tank comprises a first tank, a second tank and a third tank, which are spaced and are sequentially arranged;
• the recovery box comprises a first box and a second box;
• and the first tank is connected to and in communication with the first box;
• wherein the conveying unit comprises at least a movable member that is operable to convey the substrate sequentially through the first, second, and third tanks, wherein a developer is supplied onto the substrate in the first tank such that a first portion of the developer remains on the substrate and a second portion of the developer is collected in the first tank and flows to the first box;
• a part of the first portion of the developer drops into the second tank, as the substrate is conveyed into the second tank, the second tank being connected to and in communication with the first box so that the part of the first portion of the developer that drops into the second tank flows into the first box;
• and a remaining part of the first portion of the developer that is left on the substrate drops into the third tank, as the substrate is conveyed into the third tank, the third tank being connected to and in communication with the second box so that the remaining part of the first portion of the developer that drops into the third tank flows into the second box.