Portable information terminal, beam irradiation system, and program
AssigneeHitachi High-Tech Science Corporation
InventorsTakuma Aso, Atsushi Uemoto, Tatsuya Asahata, Masato Suzuki
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AssigneeHitachi High-Tech Science Corporation
InventorsTakuma Aso, Atsushi Uemoto, Tatsuya Asahata, Masato Suzuki
Estimating the term…
A portable information terminal is separated from a charged particle beam irradiation apparatus for performing processing of a sample by irradiating the sample with a charged particle beam. The portable information terminal performs operation of a first operation item at a desired position and includes a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating the first operation item based on operation by a user, the first operation item being one or more operation items among a plurality of items operable in the charged particle beam irradiation apparatus.
A portable information terminal separate from a charged particle beam irradiation apparatus for performing processing of a sample by irradiating the sample with a charged particle beam, the portable information terminal comprising:
A beam irradiation system comprising:
Dependencies are inferred from the claim text.