Single solution impedance matching system, method and apparatus

A method for matching an impedance of a radio frequency (RF) load to an impedance of a RF source, said method comprising the steps of:

• (a) coupling an RF source having a first impedance to an input of a 1:N step-up impedance transformer, wherein the first impedance of the RF source is stepped up to a second impedance at an output of the 1:N step-up impedance transformer, the second impedance is N times the first impedance, and the second impedance is greater that the RF load impedance;
• (b) coupling a matching network between the output of the 1:N step-up impedance transformer and an RF load, wherein the matching network comprises a variable capacitor and a variable inductor;
• (c) measuring the RF source frequency, and the RF load voltage, current and phase;
• (d) determining inductance and capacitance values required to match the RF load impedance to the RF source impedance using the measured frequency, voltage, current and phase;
• and
• (e) setting the variable inductor to the determined inductance value and the variable capacitor to the determined capacitance value.

An apparatus for matching an impedance of a radio frequency (RF) load to an impedance of a RF source, comprising:

• a 1:N step-up impedance transformer having an input adapted for coupling to a RF source having a first impedance, wherein the first impedance of the RF source is stepped up to a second impedance at an output of the 1:N step-up impedance transformer, the second impedance is N times the first impedance, and the second impedance is greater than the RF load impedance;
• a matching network coupled to the output of the 1:N step-up impedance transformer, wherein the matching network comprises a variable capacitor and a variable inductor;
• and
• a step-up impedance transformer for increasing the RF load impedance or a step-down impedance transformer for decreasing the RF load impedance, wherein the step-up impedance transformer or the step-down impedance transformer is coupled between the RF load and the matching network.