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US 10,483,943 B2Granted
Artificially oriented piezoelectric film for integrated filters
AssigneeGlobalfoundries Inc.
InventorsVincent J. McGahay, Bhupesh Chandra
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Abstract
The present disclosure relates to semiconductor structures and, more particularly, to artificially oriented piezoelectric films for integrated filters and methods of manufacture. The structure includes: a piezoelectric film with effective crystalline orientations of the polar axis rotated 90 degrees from a natural orientation for planar deposited films; and a conductor pattern formed on a surface of the piezoelectric film.
Claims8
A structure comprising:
- a piezoelectric film with effective crystalline orientations of a polar axis rotated 90 degrees from a natural orientation for planar deposited films;
- and
- a conductor pattern formed on a surface of the piezoelectric film, wherein
- the conductor pattern comprises electrodes formed on a single, planar surface of the piezoelectric film,
- the piezoelectric film has an effective crystalline orientation of the polar axis in a horizontal orientation, with respect to the conductor pattern, and
- the effective crystalline orientations of the polar axis are in a vertical direction adjacent to an underlying substrate.
3 more elements
A structure comprising:
- a piezoelectric film with effective crystalline orientations of a polar axis rotated 90 degrees from a natural orientation for planar deposited films;
- and
- a conductor pattern formed on a surface of the piezoelectric film,
- wherein the effective crystalline orientations of the polar axis are in a vertical direction adjacent to an underlying substrate.
1 more element
Dependencies are inferred from the claim text.