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US 10,483,941 B2Granted
Acoustic wave device and method of manufacturing the same
AssigneeTaiyo Yuden Co., Ltd.
InventorYohei Shimizu
Life of this patent
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Abstract
An acoustic wave device includes: a piezoelectric substrate; an IDT that is formed on the piezoelectric substrate and includes a pair of comb-shaped electrodes facing each other, each of the pair of comb-shaped electrodes including an grating electrode that excites an acoustic wave and a bus bar to which the grating electrode is connected; and reforming regions that are located only inside the piezoelectric substrate and arranged at intervals under the IDT, and in which a material of the piezoelectric substrate is reformed.
Claims14
An acoustic wave device comprising:
- a single piezoelectric substrate;
- an IDT that is formed on the single piezoelectric substrate and includes a pair of comb-shaped electrodes facing each other, each of the pair of comb-shaped electrodes including a grating electrode that excites an acoustic wave and a bus bar to which the grating electrode is connected;
- and
- reforming regions that are located only inside the single piezoelectric substrate and arranged at intervals each other under the IDT, and in which a material of the single piezoelectric substrate is reformed,
- wherein the reforming regions have an amorphous structure.
2 more elements
Dependencies are inferred from the claim text.