Electrostatically deflectable micromechanical device

A micromechanical device comprising:

• a deflectable element, wherein the deflectable element comprises:
• an electrostatic actuator which is implemented as a plate capacitor extending along and spaced apart in a direction of deflection from a neutral fiber of the delectable element, the capacitor comprising a distal and a proximal electrode,
• wherein the distal electrode is arranged on a side of the place capacitor facing away from the neutral fiber and the place capacitor is subdivided along a direction into segments between which the distal electrode and the proximal electrode are connected mechanically at segment boundaries such that, by providing the plate capacitor with a voltage, the deflectable element is deflected along the direction in or opposite to the direction of deflection, and
• wherein an insulation layer extends between the distal electrode and the proximal electrode in a manner formed continuously in the direction across the segments and segment boundaries so as to insulate same from one another such that mechanical coupling at the segment boundary is realized indirectly via the insulation layer.

A micromechanical device comprising a deflectable element, wherein the deflectable element comprises an electrostatic actuator which is implemented as a plate capacitor extending along and spaced apart in a deflection direction from a neutral fiber of the deflectable element, the capacitor comprising a distal electrode and a proximal electrode, wherein the proximal electrode is arranged between the distal electrode and the neutral fiber and the plate capacitor is subdivided along a direction into segments between which the distal electrode is fixed mechanically at segment boundaries such that the deflectable element, by providing the plate capacitor with a voltage, is deflected along the direction in or opposite to the deflection direction, wherein:

• the proximal electrode is arranged at a side of an insulation material of the deflectable element facing the distal electrode and is structured along the direction so as to comprise gaps at the segment boundaries such that the distal electrode is mounted mechanically to the insulation material at the segment boundaries in a manner laterally spaced apart from the proximal electrode,
• wherein the proximal electrode comprises one portion per segment, wherein the portions are spaced apart from one another at the segment boundaries via the gaps and wherein the portions of the proximal electrode are short-circuited to one another to be placed at a first common potential so that the proximal electrode is at the first common potential across the segments and segment boundaries, and
• the distal electrode is formed to be continuous in the direction across the segments and segment boundaries so that the distal electrode is at a second common potential across the segments and segment boundaries.

A micromechanical device comprising a deflectable element, wherein the deflectable element comprises an electrostatic actuator which is implemented as a plate capacitor extending along and spaced apart in a direction of deflection from a neutral fiber of the delectable element, the capacitor comprising a distal and a proximal electrode, wherein the distal electrode is arranged on a side of the place capacitor facing away from the neutral fiber and the place capacitor is subdivided along a direction into segments between which the distal electrode and the proximal electrode are connected mechanically at segment boundaries such that, by providing the plate capacitor with a voltage, the deflectable element is deflected along the direction in or opposite to the direction of deflection, wherein:

• an insulation layer extends between the distal electrode and the proximal electrode in a manner formed continuously in the direction across the segments and segment boundaries so as to insulate same from one another such that mechanical coupling at the segment boundary is realized indirectly via the insulation layer, and between the segment boundaries a gap is arranged between the proximal electrode and the distal electrode at each segment in addition to the insulation layer, and
• the proximal electrode is formed to be continuous in the direction across the segments and segment boundaries so that the proximal electrode is at a first common potential across the segments and segment boundaries, and the distal electrode is formed to be continuous in the direction across the segments and segment boundaries so that the distal electrode is at a second common potential across the segments and segment boundaries.