Vertical slider with built-in movable coil linear motor

A vertical slider comprising:

• an elongated plate bed constituting opposing plate magnet yokes, a movable table travelling in a reciprocating manner lengthwise of the bed through a ball spline, field magnets lying on opposed surfaces of the magnet yokes each constituted with more than one magnets which are arranged lengthwise in such a relation that unlike poles are alternately adjacent each other and also opposed across a gap, and a movable coil linear motor having an armature assembly lying in the gap between the field magnets and having more than one armature coils is arranged on a coil substrate fastened to the movable table to move in a reciprocating manner relatively to the bed under the electromagnetic mutual relation between a current flow in the armature assembly and the magnetic flux in the field magnet,
• wherein a hollow ball-spline shaft having a through-hole extends through a lengthwise through-hole of the ball spline shaft is supported for sliding movement by a first outer shell fastened to the underneath of the bed and a second outer shell fastened to an upper portion of the bed,
• wherein a foremost nozzle is formed at a lower portion of the through-hole of the ball spline shaft and a rearmost nozzle is formed at a top side of the through-hole of the ball spline shaft,
• wherein the bed is composed of an elongated rectangular substrate to provide one of the magnet yokes, an opposite upper plate of rectangular shape less in width and length than the substrate arranged in parallel and in opposition to the substrate while keeping a predetermined interval between them to provide another magnet yoke, and a side plate is fastened to any one of the substrate and the opposite upper plate to provide a mounting reference surface for the substrate,
• wherein a location opposing to the substrate other than the portions opposing to the opposite upper plate are covered with a covering fastened to the substrate at a predetermined interval and a plane surface of the opposite upper plate opposing to the substrate is made in a reference surface of the linear motor, and wherein a dimension from the reference surface of the substrate to the outside plane of the covering is made in the width dimension of the slider, and
• wherein escape holes are made in a part of the covering and a part of the substrate of the bed opposing to outer shells constituting the ball spline, and the outer shells fit into the escape holes in the covering and the escape holes are designed to have dimensions lying within the thickness dimensions of the substrate and the covering.