US 10,483,610 B2 · Waveguide mount for microstrip circuit and material characterization

Abstract

The present invention relates to a waveguide-to-microstrip line transition package for superconducting film characterization. The package allows propagation and impedance properties thin-film microwave line superconductor to be characterized at millimeter wave frequencies as a function of frequency. The superconducting film's kinetic inductance can be varied by applying direct current along the ground plane via spring loaded probe. When implemented with a non-superconducting metal housing the present invention is highly suitable for measuring resonators with the quality factor, Q, ranges from 100 to 1×104. Through the use of a housing realized from an appropriate superconducting bulk material or coating the upper end of this range of applicability can be readily extended to >1×106.

Claims17

Dependent claims

A superconducting film device comprising:

a superconducting microstrip device including:
a silicon substrate disposed on a silicon handling wafer;
a microstrip feed line;
and
a plurality of superconducting microstrip resonators and a half-wavelength resonator, disposed on said silicon substrate and coupled to said microstrip feed line;
wherein said silicon substrate is a single-crystal silicon substrate of 50 μm in thickness.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

15/684,215Filed 23 Aug 2017

Published

US 2019/0067779 A128 Feb 2019

Granted

19 Nov 2019

Term ends

Not estimatedThe source records don’t support an estimate.

Classification11 codes

H01P 5/087
For linking dissimilar lines or devices: transitions to a dielectric waveguide
H01P 1/2039
Strip line filters: galvanic coupling between Input/Output
H01P 3/08
With two longitudinal conductors: microstrips; Strip lines
H01P 5/028
Transitions between lines of the same kind and shape, but with different dimensions: between strip lines

Waveguide mount for microstrip circuit and material characterization

Life of this patent

Waveguide mount for microstrip circuit and material characterization

Life of this patent

Abstract

Claims17