Back to results
US 10,483,535 B2Granted
Apparatus comprising a plurality of nanowires
AssigneeInfineon Technologies AG
InventorsMarko Lemke, Stefan Tegen, Uwe Rudolph
Life of this patent
Estimating the term…
Abstract
A method for manufacturing a plurality of nanowires, the method including: providing a carrier comprising an exposed surface of a material to be processed and applying a plasma treatment on the exposed surface of the material to be processed to thereby form a plurality of nanowires from the material to be processed during the plasma treatment.
Claims19
A nanowire array comprising:
- a carrier comprising silicon;
- a diffusion barrier layer disposed over the carrier, the diffusion barrier layer comprising a nitride;
- a plurality of nanowires disposed over the diffusion barrier layer, the nanowires of the plurality of nanowires comprising silicon;
- wherein a majority of the nanowires of the plurality of nanowires are aligned substantially perpendicular to the diffusion barrier layer;
- and
- a silicon layer disposed over the diffusion barrier layer, wherein the nanowires of the plurality of nanowires are formed over the silicon layer.
3 more elements
A nanostructure array comprising:
- a wafer;
- a diffusion barrier layer disposed over the wafer, the diffusion barrier layer comprising an electrically conductive nitride;
- a layer disposed over the diffusion barrier layer;
- a plurality of nanostructures disposed over the diffusion barrier layer, wherein both the plurality of nanostructures and the layer comprise a same material;
- and
- wherein a majority of the plurality of nanostructures are aligned substantially perpendicular to the diffusion barrier layer.
3 more elements
A battery comprising:
- a carrier;
- a first layer stack disposed over the carrier, the first layer stack comprising a diffusion barrier layer disposed over the carrier and a surface layer disposed over the diffusion barrier layer, wherein the diffusion barrier layer is configured to prevent diffusion of lithium-ions into the carrier during battery storage and operation and wherein the surface layer comprises at least one material;
- a plurality of nanowires disposed over the surface layer, the nanowires of the plurality of nanowires comprise the at least one material,
- wherein a majority of the nanowires of the plurality of nanowires are aligned substantially perpendicular to the diffusion barrier layer;
- a second layer stack disposed over the plurality of nanowires, wherein the second layer stack comprises
- at least one electrolyte layer,
- at least one cathode layer, and
- at least one cathode current collector layer,
- wherein the plurality of nanowires is at least part of an anode of the battery.
6 more elements
Dependencies are inferred from the claim text.