Semiconductor memory device

A semiconductor device comprising:

• a substrate;
• a reference magnetic pattern disposed on the substrate, and including a first pinned pattern, a second pinned pattern, and an exchange coupling pattern;
• an intervening pattern disposed on the reference magnetic pattern;
• a polarization enhancement magnetic pattern disposed on the intervening pattern;
• a tunnel barrier pattern disposed on the polarization enhancement magnetic pattern;
• and
• a free magnetic pattern disposed on the tunnel barrier pattern,
• wherein the exchange coupling pattern is disposed on the second pinned pattern,
• the first pinned pattern is disposed on the exchange coupling pattern,
• the first pinned pattern includes first ferromagnetic patterns and first non-magnetic patterns that are alternately stacked,
• each of the first non-magnetic patterns includes a non-magnetic material having an anti-ferromagnetic coupling property, and
• the second pinned pattern includes CoPt or CoPt alloy.

A semiconductor device comprising:

• a substrate;
• a reference magnetic pattern disposed on the substrate, and including a first pinned pattern, a second pinned pattern, and an exchange coupling pattern;
• an intervening pattern disposed on the reference magnetic pattern;
• a polarization enhancement magnetic pattern disposed on the intervening pattern;
• a tunnel barrier pattern disposed on the polarization enhancement magnetic pattern;
• and
• a free magnetic pattern disposed on the tunnel barrier pattern,
• wherein the exchange coupling pattern is disposed on the second pinned pattern,
• the first pinned pattern is disposed on the exchange coupling pattern,
• the first pinned pattern includes first ferromagnetic patterns and first non-magnetic patterns that are alternately stacked,
• the first ferromagnetic patterns includes cobalt (Co),
• the first non-magnetic patterns includes iridium (Ir), and
• the second pinned pattern includes a first element that is the same ferromagnetic material as the first ferromagnetic patterns, and a second element that is a different non-magnetic material from the first non-magnetic patterns.