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US 10,483,452 B2Granted
Piezoelectric film and piezoelectric element including the same
AssigneeFUJIFILM Corporation
InventorsNaoki Murakami, Daigo Sawaki
Life of this patent
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Abstract
In the piezoelectric film including a perovskite oxide which is represented by General Formula P, 0.1≤x≤0.3 and 0<y≤0.49x are satisfied, A1+δ[(Zr,Ti)1-x-yNbxScy]Oz . . . General Formula P, in General Formula P, A is an A-site element primarily containing Pb, δ=0 and z=3 are standard values, but δ and z may deviate from standard values in a range in which a perovskite structure is capable of being obtained.
Claims7
A piezoelectric film comprising:
- a perovskite oxide which is represented by General Formula P,
- A1+δ[(Zr,Ti)1-x-yNbxScy]Oz General Formula P
- in General Formula P, A is an A-site element primarily containing Pb, δ=0 and z=3 are standard values, but δ and z may deviate from the standard values in a range in which a perovskite structure is capable of being obtained,
- wherein 0.1≤x≤0.3 and 0<y≤0.49x are satisfied.
1 more element
Dependencies are inferred from the claim text.