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US 10,483,444 B2Granted
Method of producing an optoelectronic semiconductor component, optoelectronic semiconductor component, and temporary carrier
AssigneeOSRAM Opto Semiconductors GmbH
InventorsHarald Jäger, Jürgen Moosburger, Herbert Brunner
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Abstract
A method of producing an optoelectronic semiconductor component includes providing a carrier including two metal layers, wherein the metal layers are detachable from one another, securing an optoelectronic semiconductor chip on the first metal layer of the carrier, and mechanically detaching the second metal layer from the first metal layer.
Claims11
A method of producing an optoelectronic semiconductor component comprising:
- providing a carrier comprising two metal layers, wherein the metal layers are detachable from one another,
- applying a photoresist on the first metal layer,
- patterning the photoresist such that regions composed of the photoresist comprising a predefined cross section are present on the first metal layer,
- electrolytically applying a further metal on free regions of the first metal layer not covered by the photoresist, wherein the further metal comprises a greater thickness than the photoresist and partly projects laterally beyond regions of the photoresist,
- removing the photoresist, wherein a body composed of the further metal arises, said body comprising a laterally projecting upper edge region,
- securing an optoelectronic semiconductor chip on the further metal, and
- mechanically detaching the second metal layer from the first metal layer.
4 more elements
A method of producing an optoelectronic semiconductor component comprising:
- providing a carrier comprising two metal layers, wherein the metal layers are detachable from one another,
- securing an optoelectronic semiconductor chip on the first metal layer, and mechanically detaching the second metal layer from the first metal layer, wherein
- a) producing the carrier comprises:
- applying a chromium layer on a metal layer, wherein the metal layer comprises a thickness of 30 to 200 μm,
- applying a photoresist on the chromium layer,
- patterning the photoresist such that regions composed of photoresist comprising a predefined cross section are configured on the chromium layer,
- electrolytically applying a further metal on the chromium layer, wherein the further metal comprises a greater thickness than the photoresist and partly projects beyond the regions composed of photoresist,
- removing the photoresist, wherein a body composed of the further metal arises, said body comprising a projecting upper edge region,
- b) the method further comprises:
- securing an optoelectronic semiconductor chip on the electrolytically applied metal,
- applying an electrically insulating material, and
- mechanically detaching the metal layer.
9 more elements
Dependencies are inferred from the claim text.