Advanced electronic device structures using semiconductor structures and superlattices
AssigneeSilanna UV Technologies Pte Ltd
InventorsPetar Atanackovic, Matthew Godfrey
Life of this patent
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Abstract
Semiconductor structures and methods for forming those semiconductor structures are disclosed. For example, a p-type or n-type semiconductor structure is disclosed. The semiconductor structure has a polar crystal structure with a growth axis that is substantially parallel to a spontaneous polarization axis of the polar crystal structure. The semiconductor structure changes in composition from a wider band gap (WBG) material to a narrower band gap (NBG) material or from a NBG material to a WBG material along the growth axis to induce p-type or n-type conductivity.
Claims20
A set of semiconductor superlattices comprising:
- a p-type or n-type first semiconductor superlattice comprising a plurality of unit cells each comprising at least two distinct layers formed of a substantially single crystal semiconductor, the p-type or n-type first semiconductor superlattice having a polar crystal structure with a growth axis being substantially parallel to a spontaneous polarization axis of the polar crystal structure, an average composition of the unit cells of the p-type or n-type first semiconductor superlattice exhibiting a monotonic change from an average composition corresponding to a wider band gap (WBG) material to an average composition corresponding to a narrower band gap (NBG) material or from an average composition corresponding to a NBG material to an average composition corresponding to a WBG material along the growth axis, which induces p-type or n-type conductivity;
- a second semiconductor superlattice with a first constant average composition in the direction of the growth axis, wherein the second semiconductor superlattice is adjacent to a first side of the p-type or n-type first semiconductor superlattice in the direction of the growth axis;
- and
- a third semiconductor superlattice with a second constant average composition in the direction of the growth axis, wherein the third semiconductor superlattice is adjacent to a second side of the p-type or n-type first semiconductor superlattice in the direction of the growth axis.
Dependencies are inferred from the claim text.