Metal oxide thin-film transistor and manufacturing method for the same
AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorYang Liu
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AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorYang Liu
Estimating the term…
A metal oxide thin-film transistor and manufacturing for the same are provided. The thin-film transistor includes a substrate; a source electrode, a barrier layer and a drain electrode which are sequentially formed on the substrate; and a semiconductor active layer formed on side surfaces of the source electrode and the drain electrode. The semiconductor active layer is connected with the source electrode and the drain electrode. The metal oxide thin-film transistor has a new structure, in which the source and drain electrodes are parallel to the substrate, and the semiconductor active layer is contacted with the source electrode and the drain electrode by a vertical covering or a step covering way. The channel length does not depend on the photolithography process, but depends on the side length of the source and drain electrodes contacted with the semiconductor active layer.
A metal oxide thin-film transistor, comprising:
Dependencies are inferred from the claim text.