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US 10,483,369 B2Granted
Methods of forming replacement gate structures on transistor devices
AssigneeGlobalfoundries Inc.
InventorsHaigou Huang, Xusheng Wu, Jinsheng Gao
Life of this patent
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Abstract
One illustrative method disclosed herein includes, among other things, forming a sacrificial gate structure above a semiconductor substrate, the sacrificial gate structure comprising a sacrificial gate insulation layer and a multi-layer sacrificial gate electrode structure, removing the sacrificial gate structure to form a replacement gate cavity, and forming a replacement gate structure in the replacement gate cavity.
Claims11
A method, comprising:
- forming a continuous line-type sacrificial gate structure above a semiconductor substrate by performing a method that comprises:
- forming a sacrificial gate insulation layer above said semiconductor substrate;
- forming a first sacrificial gate electrode material layer above said sacrificial gate insulation layer;
- and
- forming a second sacrificial gate electrode material layer above said first sacrificial gate electrode material layer;
- after forming said continuous line-type sacrificial gate structure, removing a portion of said second sacrificial gate electrode material layer and removing a portion of said first sacrificial gate electrode material layer so as to thereby form a first opening positioned above said sacrificial gate insulation layer, wherein said first opening extends through an entirety of said second sacrificial gate electrode material layer of said continuous line-type sacrificial gate structure and at least partially through said first sacrificial gate electrode material layer of said continuous line-type sacrificial gate structure;
- forming an insulating gate separation structure in said first opening;
- removing materials of said sacrificial gate structure on opposite sides of said insulating gate separation structure to form first and second replacement gate cavities on said opposite sides of said insulating gate separation structure;
- and
- forming first and second replacement gate structures in said first and second replacement gate cavities, respectively.
7 more elements
Dependencies are inferred from the claim text.