Multi-sensor optical device for detecting chemical species and manufacturing method thereof
AssigneeSTMicroelectronics S.r.l.
InventorsMassimo Cataldo Mazzillo, Alfio Russo
Life of this patent
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Abstract
An optical device for detecting a first chemical species and a second chemical species contained in a specimen, which includes: a first optical sensor, which may be optically coupled to an optical source through the specimen and is sensitive to radiation having a wavelength comprised in a first range of wavelengths; and a second optical sensor, which may be optically coupled to the optical source through the specimen and is sensitive to radiation having a wavelength comprised in a second range of wavelengths, different from the first range of wavelengths.
Claims17
A device, comprising:
- a substrate;
- a semiconductor layer on the substrate, the semiconductor layer having a first portion with a first thickness and a second portion with a second thickness, the first portion having a first surface;
- a first optical sensor in the first portion, the first optical sensor including:
- a first anode recessed in the first portion, the first anode having an exposed surface coplanar with the first surface;
- and
- a second optical sensor in the second portion.
A device, comprising:
- a substrate;
- a semiconductor layer on the substrate, the semiconductor layer having a first portion with a first thickness and a second portion with a second thickness;
- a first optical sensor formed on a first surface of the first portion;
- a second optical sensor formed on a second surface of the second portion;
- and
- a contact layer formed on a third surface of the semiconductor layer, the third surface being opposite the first surface and the second surface.
A device, comprising:
- a substrate;
- a semiconductor layer on a first surface of the substrate;
- a first sensor in the semiconductor layer, the first sensor including:
- a first anode;
- and
- a first contact coupled to the first anode;
- a second sensor in the semiconductor layer, the second sensor including:
- a second anode;
- an absorption layer on the second anode;
- and
- a second contact coupled to the second anode;
- a cathode on a second surface of the substrate, the second surface being opposite the first surface of the substrate, the cathode extending between the first sensor and the second sensor.
Dependencies are inferred from the claim text.